The development and manufacturing of the clean room robots based on the long and detailed experiences of Hirata’s robot technology. These robots can be easily and very efficiently integrated into automatic semiconductor machine. The robots are conform with mandatory SEMI standards.
EFEM’s – Equipment Front End Modules are turn key wafer handling units consist of robot, pre-aligner, load ports and machine housing. The design and functions are adapted to customer’s requirement.
Wafer can be centred and orientated by Hirata’s pre-aligner.
Our FOUP openers are designed for handling of FOUP (Front Opening Unified Pods) and FOSB (Front Opening Shipping Boxes) and are available for wafer size 8” and 12”.